論文 (1982 - 1984 : 1編 )

  1. "Vapour Phase Etching of InP Using Anhydrous HCl and PH3 Gas." J. Electrochem. Soc., vol.133, No.10, p. 2204-2205, 1986. K. Pak, Y. Koide, K. Imai, A. Yoshida, N. Nakamura , Y. Yasuda, and T. Nishinaga

日本語ホームへ, English Main Page,