金属/Si & 絶縁物/Si:−論文 (13)−
- Formation of Si-SiO2 Interface at Low
Temperatures Using Microwave-Excited Plasma. Appl. Surface Sci.
vol. 41/42, p. 429-432, May, 1989. S. Zaima, T. Kaida, Y. Koide,
and Y. Yasuda
- Y-Ba-Cu-O Superconducting Thin Films
Prepared by Plasma-Assisted Flash Evaporation. Appl. Phys. Letters,
vol. 55, No .3, p. 307-309, July, 1989. Y. Yasuda, Y. Koide, S. Zaima, and
N. Sano
- Mechanisms of Silicon Oxidation at Low
Temperatures by Microwave- Excited O2 Gas and
O2-N2 Mixed Gas. J. Appl.
Phys. vol. 67, No. 5,
p.2603-2607, March, 1990. Y. Yasuda, S. Zaima, T. Kaida, and
Y. Koide
- Conduction Mechanism of Leakage Current in
Ta2O5 Films on Si Prepared by LPCVD. J. Electrochem. Soc.,
vol.137, No. 9, p. 2876-2879, September, 1990. S. Zaima, T. Furuta, Y. Koide,
M. Iida, and Y. Yasuda
- Solid Phase Reaction and Electrical
Properties in Zr/Si Systems. Appl.
Phys. Letters, vol. 57, No.11, p.
1105-1107, September, 1990. T. Yamauchi, S. Zaima, K. Mizuno, H.
Kitamura, Y.
Koide, and Y. Yasuda
- Anisotropy of Piezoresistance in N-Channel
Inversion Layers of Metal-Oxide-Semiconductor Transistors on
(001)Si. J. Appl.
Phys., vol. 68, No.11, p.
5687-5691, December, 1990. T. Maruyama, S. Zaima, Y. Koide,
Y. Kanda, and Y. Yasuda
- Effects of Oxidation Conditions on
Electrical Properties of SiC-SiO2 Interface.
J. Appl. Phys., vol. 68, No. 12, p. 6304-6308, December, 1990. S. Zaima, K. Onoda, Y. Koide,
and Y. Yasuda
- Solid-Phase Reactions and Crystallographic
Structures in Zr/Si Systems. J. Appl.
Phys., vol. 69, No. 10, p. 7050-7056, May, 1991. T. Yamauchi, S. Zaima, K. Mizuno, H.
Kitamura, Y.
Koide, and Y. Yasuda
- Formation of Interfacial Layers and
Electrical Conduction Mechanisms Dominating The Contact
Resistivity in Refractory Metal-Si Contacts. Appl. Surface Sci.,
vol. 56-58, p. 545-550, April, 1992. T. Yamauchi, M. Kataoka, S. Zaima,
Y. Koide, and Y. Yasuda
- Observation of Si-SiO2 Interface States
within The Conduction Band by Tunneling Current Spectroscopy.
Appl. Surface Sci. vol.
56-58, p. 69-74, April, 1992. M. Sakashita, S. Zaima, Y. Koide,
and Y. Yasuda
- Study on determing factors of low contact
resistivity in transition metal-silicon systems. Appl. Surface Sci.
vol. 70/71, p. 624-628, April, 1993. S.Zaima, T.Yamauchi, Y.Koide,
and Y.Yasuda
- Photoelectron spectroscopic studies on
interfacial reactions in Zr/2x1(100) Si systems. J. Vac. Sci. & Tech. A, vol.11, No.5, p. 2619-2622, October, 1993. T. Yamauchi, H. Kitamura, N. Wakai, S.
Zaima, Y.
Koide, and Y. Yasuda
- Fabrication and carrier transport of,
one-dimensional quntum wires of p-type silicon. J. Vac. Sci. & Tech. B, vol.
11, No.1, p. 61-65,
January/February, 1993. H. Iwano, S.Zaima, Y.Koide, and
Y.Yasuda
−国際会議発表(3)−
- Formation of Si-SiO2 Interface at Low Temperatures Using Microwave-Excited Plasma. 2nd Int.
Conf. on Formation of Semiconductor Interface, Takarazuka, (Japan) Abst.
p. 161, November, 1988. S. Zaima, T. Kaida, Y. Koide,
Y. Yasuda
- Formation of Interfacial Layers and Electrical Conduction Mechnisms Dominating
The Contact Resistivity in Refractory Metal-Metal-Si Contacts. 3rd Int.
Conf. on Formation of Semiconductor Interface, Rome, (Italy) Abst. p. 89,
May, 1991. T. Yamauchi, M. Kataoka, S. Zaima,
Y. Koide, and Y. Yasuda
- Observation of Si-SiO2 Interface States within The Conduction Band by Tunneling Current Spectroscopy.
3rd Int. Conf. on Formation of Semiconductor Interface, Rome, (Italy) Abst.
p. 168, May, 1991. M. Sakashita, S. Zaima, Y. Koide,
and Y. Yasuda
トップヘ, 日本語ホームへ, English Main
Page,