MEMS -論文（５）-

1. "Batch production of single-crystal diamond bridges and cantilevers for microelectromechanical systems," M. Y. Liao, C. Li, S. Hishita, Y. Koide, J. Micromech. & Micoreng., vol. 20, No. 8, 085002, 2010.
2. 1st Single-crystalline Diamond MEMS switch; "Suspended single-crystal diamond nanowires for high-performance nanoelectromechanical switches." M. Y. Liao, S. Hishita, E.. Watanabe, S. Koizumi, Y. Koide, Adv. Mater. vol. 22, 5393, 2010.
3. Review; "Carbon-Based Materials: Growth, Properties, MEMS/NEMS Technologies, and MEM/NEM Switches"  M. Y. Liao and Y. Koide, Critical Reviews in Solid State and Materials Sciences, Volume 36, Issue 2, 2011, p. 66 - 101, 2011.
4. "Nanoelectromechanical switch fabricated single crystal diamond: Experiments and modeling," Meiyong Liao, Zouwen Rong, Shunichi Hishita, Masataka Imura, Satoshi Koizumi, Yasuo Koide, Diamond Relat. Mater., vol. 24, 69-73, 2012.
5. "Improvement of the quality factor of single crystal diamond mechanical resonators," M.W. Liao, M. Toda, S. Liwen, T. Teraji, M. Imura, and Y. Koide, Jpn. J. Appl. Phys., 56, 024101 (2017). DOI: 10.7567/JJAP.56.024101.

-国際会議発表(１）

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