InP：-論文-

1. "Vapour Phase Etching of InP Using Anhydrous HCl and PH₃ Gas." J. Electrochem. Soc., vol.133, No.10, p. 2204-2205, 1986. K. Pak, Y. Koide, K. Imai, A. Yoshida, N. Nakamura , Y. Yasuda, and T. Nishinaga

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